| dc.contributor.author | Yamanouchi, Kazuhiko | |
| dc.contributor.author | Meguro, Toshiyasu | |
| dc.contributor.author | Cho, Yasuo | |
| dc.date.accessioned | 2015-12-22T07:50:57Z | |
| dc.date.available | 2015-12-22T07:50:57Z | |
| dc.date.issued | 1990 | |
| dc.identifier.isbn | 83-232-0336-9 | |
| dc.identifier.issn | 0867-2997 | |
| dc.identifier.uri | http://hdl.handle.net/11089/15884 | |
| dc.description.abstract | Nanometer electrodes of the order of 0.085 μm width have been fabricated using direct
electron beam lithography, normal lift-off techniques and 0₂-plasma cleaning system. These
techniques have been applied to Inter-Digital Transducers (IDТ) as surface acoustic wave (SAW)
transducers in the GHz-range. We performed SAW filter experiments at GHz-range. Filters with
minimum insertion loss of 16.0 dB at the center frequency of 5 GHz and 27 dB at 11 GHz were obtained. | pl_PL |
| dc.description.sponsorship | Zadanie pt. Digitalizacja i udostępnienie w Cyfrowym Repozytorium Uniwersytetu Łódzkiego kolekcji czasopism naukowych wydawanych przez Uniwersytet Łódzki nr 885/P-DUN/2014 zostało dofinansowane ze środków MNiSW w ramach działalności upowszechniającej naukę. | pl_PL |
| dc.language.iso | en | pl_PL |
| dc.publisher | Wydawnictwo Naukowe Uniwersytetu im. Adama Mickiewicza w Poznaniu | pl_PL |
| dc.relation.ispartofseries | Acta Physicae Superficierum;2 | |
| dc.title | GHz Range SAW Transducers Using Electron Beam Lithography | pl_PL |
| dc.type | Article | pl_PL |
| dc.page.number | 3-7 | pl_PL |
| dc.contributor.authorAffiliation | Research Institute of Electrical Communication, Tohocu University, Sendai, 980 Japan | pl_PL |
