GHz Range SAW Transducers Using Electron Beam Lithography
Oglądaj/ Otwórz
Data
1990Autor
Yamanouchi, Kazuhiko
Meguro, Toshiyasu
Cho, Yasuo
Metadata
Pokaż pełny rekordStreszczenie
Nanometer electrodes of the order of 0.085 μm width have been fabricated using direct
electron beam lithography, normal lift-off techniques and 0₂-plasma cleaning system. These
techniques have been applied to Inter-Digital Transducers (IDТ) as surface acoustic wave (SAW)
transducers in the GHz-range. We performed SAW filter experiments at GHz-range. Filters with
minimum insertion loss of 16.0 dB at the center frequency of 5 GHz and 27 dB at 11 GHz were obtained.
Collections