GHz Range SAW Transducers Using Electron Beam Lithography

Abstract

Nanometer electrodes of the order of 0.085 μm width have been fabricated using direct electron beam lithography, normal lift-off techniques and 0₂-plasma cleaning system. These techniques have been applied to Inter-Digital Transducers (IDТ) as surface acoustic wave (SAW) transducers in the GHz-range. We performed SAW filter experiments at GHz-range. Filters with minimum insertion loss of 16.0 dB at the center frequency of 5 GHz and 27 dB at 11 GHz were obtained.